Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon
Y. Yatsurugi, N. Akiyama, Y. Endo, T. Nozaki
Journal of The Electrochemical Society 120 (7) 975 (1973) · The Electrochemical Society
DOI: 10.1149/1.2403610
Data: JSON record · id doi:10.1149/1.2403610 · metadata: crossref
Roles in ORCHID
- cited as the original source of values
Systems
Evidence in ORCHID
3 values in 1 other papers cite this work as their source.
| experimental | 3 |
Phase-registry phases citing it: phase:n-si:a4-diamond, phase:n-si:liquid, phase:n-si:si3n4
Availability
Read by ORCHID: no. Open-access licence (Crossref license field): none deposited. Crossref is-referenced-by count: 252 (retrieved 2026-10-23).
Relations
Cited by (Crossref reference lists) (6)
- Phase Equilibria in the Si-B-C-N System (2007) [crossref_reference_list]
- The O-Si (Oxygen-Silicon) system (1990) [crossref_reference_list]
- Thermodynamic assessment of the Si–N system (2003) [crossref_reference_list]
- Thermodynamic optimization of Si-Zr-N system using Calphad approach coupled with ab initio methods (2018) [crossref_reference_list]
- Critical evaluation and thermodynamic optimization of the Si-N, Si-C, C-N and Si-C-N systems and its applications to high purity SiC production (2022) [crossref_reference_list]
- Thermodynamics and phase stability in the Si–O system (2004) [crossref_reference_list]
Cited for values by (1)
- Thermodynamic assessment of the Si–N system (2003) — 3 values [orchid_extraction]
Used in (assessments / papers that took values from it) (1)
- Thermodynamic assessment of the Si–N system (2003) — 3 values [orchid_extraction]