Thermodynamic assessment of the Si–N system

Xiaoyan Ma, Changrong Li, Fuming Wang, Weijing Zhang

Calphad 27 (4) 383-388 (2003) · Elsevier BV

DOI: 10.1016/j.calphad.2003.12.005

Data: JSON record · id doi:10.1016/j.calphad.2003.12.005 · metadata: crossref

Roles in ORCHID

• read by ORCHID (values extracted): 37 released values
• assessment behind a TDB file: SiN-03Ma-LB.tdb (N–Si)

Systems

N–Si

Evidence in ORCHID

37 values read from this paper (34 accepted), from 3 tables and 3 text passages.

Phase-registry phases citing it: phase:n-si:a4-diamond, phase:n-si:gas, phase:n-si:liquid, phase:n-si:n2gas, phase:n-si:si3n4

Availability

Read by ORCHID: yes (values_extracted). Open-access licence (Crossref license field): none deposited. Crossref is-referenced-by count: 32 (retrieved 2026-10-23).

Relations

Cited by (Crossref reference lists) (10)

• Coupled Experimental Study and Thermodynamic Modeling of the Fe–Si–N System (2024) [crossref_reference_list]
• Ternary System N-Si-Ti (2015) [crossref_reference_list]
• The influence of nitrogen fugacity on the phase equilibria of Me–N systems (2005) [crossref_reference_list]
• Thermodynamic optimization of Si-Zr-N system using Calphad approach coupled with ab initio methods (2018) [crossref_reference_list]
• Thermodynamic reassessments of the Ti–Si–C/Ti–Si–N systems and thermodynamic calculations of CVD TiSiCN hard-coating based on the Ti–Si–C–N quaternary system (2023) [crossref_reference_list]
• The SGTE collection of binary datasets (2025) [crossref_reference_list]
• The thermodynamic assessment of the Ti–Si–N system and the interfacial reaction analysis (2005) [crossref_reference_list]
• Critical evaluation and thermodynamic optimization of the Si-N, Si-C, C-N and Si-C-N systems and its applications to high purity SiC production (2022) [crossref_reference_list]
• Fe-N-Si Ternary Phase Diagram Evaluation (2008) [crossref_reference_list]
• N-Si-Ti Ternary Phase Diagram Evaluation (2017) [crossref_reference_list]

References (Crossref, publisher-deposited) (12)

• Calculation of heterogeneous phase equilibria in the SiAlON system (1981) [crossref_reference_list]
• Re-examination of the crystal structure of α-Si3N4 (1974) [crossref_reference_list]
• The Thermo-Calc databank system (1985) [crossref_reference_list]
• SGTE data for pure elements (1991) [crossref_reference_list]
• Thermodynamics and Phase Stability in the Ga–N System (2003) [crossref_reference_list]
• Algebraic Representation of Thermodynamic Properties and the Classification of Solutions (1948) [crossref_reference_list]
• Nitrogen in Silicon (1959) [crossref_reference_list]
• On the crystal structure of the nitrides of silicon and germanium (1958) [crossref_reference_list]
• Structure du nitrure de silicium α (1969) [crossref_reference_list]
• The crystal structure of β-Si3N4: structural and stability considerations between α- and β-Si3N4 (1979) [crossref_reference_list]
• Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon (1973) [crossref_reference_list]
• Thermodynamics and phase stability in the In–N system (2002) [crossref_reference_list]

Cites (values carry this citation) (7)

• On the crystal structure of the nitrides of silicon and germanium (1958) — 4 values [orchid_extraction]
• Nitrogen in Silicon (1959) — 3 values [orchid_extraction]
• Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon (1973) — 3 values [orchid_extraction]
• Re-examination of the crystal structure of α-Si3N4 (1974) — 2 values [orchid_extraction]
• Structure du nitrure de silicium α (1969) — 2 values [orchid_extraction]
• The crystal structure of β-Si3N4: structural and stability considerations between α- and β-Si3N4 (1979) — 2 values [orchid_extraction]
• Calculation of heterogeneous phase equilibria in the SiAlON system (1981) — 1 values [orchid_extraction]

TDB files modelling its system (2)

• tdb:SiN-03Ma-LB.tdb [orchid_literature_model_link]
• tdb:SiN-03Ma-LB.tdb [sgte_tdb_header]

Reassessed by (1)

• Thermodynamic optimization of Si-Zr-N system using Calphad approach coupled with ab initio methods (2018) [citation+same-system]

Data papers used (7)

• On the crystal structure of the nitrides of silicon and germanium (1958) — 4 values [orchid_extraction]
• Nitrogen in Silicon (1959) — 3 values [orchid_extraction]
• Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon (1973) — 3 values [orchid_extraction]
• Re-examination of the crystal structure of α-Si3N4 (1974) — 2 values [orchid_extraction]
• Structure du nitrure de silicium α (1969) — 2 values [orchid_extraction]
• The crystal structure of β-Si3N4: structural and stability considerations between α- and β-Si3N4 (1979) — 2 values [orchid_extraction]
• Calculation of heterogeneous phase equilibria in the SiAlON system (1981) — 1 values [orchid_extraction]