N–Si system
34 accepted literature values from 1 paper(s) (experimental 26, model 4, unspecified 4); 0 calculated phase diagram(s). 3 further extracted value(s) not accepted by the reader-agreement checks are only in the JSON/CSV.
Data: JSON · CSV · interactive explorer · phases (8) · papers (bibliography) · Markdown
| Evidence class | Values |
|---|---|
| experimental | 26 |
| model | 4 |
| unspecified | 4 |
| Property group | Values |
|---|---|
| invariant reaction | 7 |
| phase transition | 1 |
| formation | 4 |
| heat capacity / entropy / enthalpy | 6 |
| crystal structure | 16 |
Convex hulls: Materials Project DFT hull · OQMD DFT hull · CALPHAD hull SiN-03Ma-LB · CALPHAD hull SiN-92Hil
Invariant reactions (literature)
| T (K) | Reaction / phases | Compositions (mole fraction) | Class | Source | Location | Quote |
|---|---|---|---|---|---|---|
| 2151 | Liquid + gas <-> Si3N4 | Si3N4: N 0.571429 | experimental | [1] Ma 2003 cites Chase 1998 | Table 4, p. 5, row 5 report | |
| 2150 | Liquid + gas <-> Si3N4 | Si3N4: N 0.571429 | experimental | [1] Ma 2003 cites Dorner 1981 doi | Table 4, p. 5, row 6 report | |
| 2150 | Liquid + gas <-> Si3N4 | L: N 0.00145; Si3N4: N 0.571429 | model | [1] Ma 2003 | Table 4, p. 5, row 7 report | |
| 2129 | Liquid + gas <-> Si3N4 | Si3N4: N 0.571429 | experimental | [1] Ma 2003 cites Kaiser 1959 doi | Table 4, p. 5, row 4 report | |
| 1687 | Liquid <-> diamond_Si + Si3N4 | L: N 2.000e-4; diamond_Si: N 0; Si3N4: N 0.571429 | experimental | [1] Ma 2003 cites Kaiser 1959 doi | Table 4, p. 5, row 1 report | |
| 1687 | Liquid <-> diamond_Si + Si3N4 | L: N 1.200e-4; diamond_Si: N 0; Si3N4: N 0.571429 | experimental | [1] Ma 2003 cites Yatsurugi 1973 doi | Table 4, p. 5, row 2 report | |
| 1686.94 | Liquid <-> diamond_Si + Si3N4 | L: N 0.0012; diamond_Si: N 0; Si3N4: N 0.571429 | model | [1] Ma 2003 | Table 4, p. 5, row 3 report |
Formation enthalpies
Literature values in kJ/mol-atom where the per-atom basis is known. DFT columns: the lowest-energy entry at the same composition (Materials Project 2026.04.13, OQMD v1.8; different energy references, never averaged), from dft_parity.json.
| Phase | Compound | Value | T (K) | Class | MP DFT (kJ/mol-atom) | OQMD DFT (kJ/mol-atom) | Source | Location | Quote |
|---|---|---|---|---|---|---|---|---|---|
| α | -744.752 unknown ± 29.3 | 298.15 | unspecified | [1] Ma 2003 cites Chase 1998 | Table 2, p. 2, row 5 report | ||||
| α | -735.68 unknown ± 25.08 | 298.15 | experimental | [1] Ma 2003 cites Pehlke 1959 | Table 2, p. 2, row 4 report | ||||
| α-Si3N4 | Si3N4 | -106.393 kJ/mol-atom ± 4.18571 | 298.15 | unspecified | -125.391 (mp-aaaaabma) | -117.182 (oqmd-3591) | [1] Ma 2003 cites Chase 1998 | Table 2, p. 2, row 5 report | |
| α-Si3N4 | Si3N4 | -105.097 kJ/mol-atom ± 3.58286 | 298.15 | experimental | -125.391 (mp-aaaaabma) | -117.182 (oqmd-3591) | [1] Ma 2003 cites Pehlke 1959 | Table 2, p. 2, row 4 report |
Other properties
Phase transition (1)
| Property | Value | T (K) | Phases / composition | Class | Source | Location | Quote |
|---|---|---|---|---|---|---|---|
| Phase transition | 1687 K | 1687 | liquid | experimental | [1] Ma 2003 cites Kaiser 1959 doi | p. 1 report | Using zone-melting experiments, Kaiser and Thurmond [10] and Yatsurugi et al. [11] measured the distribution of N between solid and liquid semiconductor-grade Si near its melting point (1687 K). |
Heat capacity / entropy / enthalpy (6)
| Property | Value | T (K) | Phases / composition | Class | Source | Location | Quote |
|---|---|---|---|---|---|---|---|
| Entropy printed: S298 K | 9.17143 J/mol-atom/K | 298.15 | Si3N4 alloy: Si 0.428571 | model | [1] Ma 2003 cites Koshchenko 1985 | Table 2, p. 2, row 3 report | |
| Entropy printed: S298 K | 64.2 J/mol (basis unstated)/K | 298.15 | Si3N4 | model | [1] Ma 2003 cites Koshchenko 1985 | Table 2, p. 2, row 3 report | |
| Entropy printed: S298 K | 112.967 unknown ± 16.7 | 298.15 | α | unspecified | [1] Ma 2003 cites Chase 1998 | Table 2, p. 2, row 2 report | |
| Entropy printed: S298 K | 107.008 J/mol (basis unstated)/K | 298.15 | α | experimental | [1] Ma 2003 cites Pehlke 1959 | Table 2, p. 2, row 1 report | |
| Entropy printed: S298 K | 16.1381 J/mol-atom/K ± 2.38571 | 298.15 | α-Si3N4 alloy: Si 0.428571 | unspecified | [1] Ma 2003 cites Chase 1998 | Table 2, p. 2, row 2 report | |
| Entropy printed: S298 K | 15.2869 J/mol-atom/K | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Pehlke 1959 | Table 2, p. 2, row 1 report |
Crystal structure (16)
| Property | Value | T (K) | Phases / composition | Class | Source | Location | Quote |
|---|---|---|---|---|---|---|---|
| Lattice a | 7.595 Å | β-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Grun 1979 doi | Table 1, p. 2, row 8 report | ||
| Lattice a | 7.606 Å ± 0.003 | β-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Ruddlesden 1958 doi | Table 1, p. 2, row 7 report | ||
| Lattice a | 7.608 Å | β-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Arrowsmith 1963 | Table 1, p. 2, row 6 report | ||
| Lattice a | 7.748 Å | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Arrowsmith 1963 | Table 1, p. 2, row 1 report | |
| Lattice a | 7.766 Å | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Kohatsu 1974 doi | Table 1, p. 2, row 4 report | |
| Lattice a | 7.753 Å ± 0.004 | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Ruddlesden 1958 doi | Table 1, p. 2, row 2 report | |
| Lattice a | 7.818 Å ± 0.003 | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Kato 1975 | Table 1, p. 2, row 5 report | |
| Lattice a | 7.765 Å | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Marchand 1969 doi | Table 1, p. 2, row 3 report | |
| Lattice c | 2.9023 Å | β-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Grun 1979 doi | Table 1, p. 2, row 8 report | ||
| Lattice c | 2.909 Å ± 0.002 | β-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Ruddlesden 1958 doi | Table 1, p. 2, row 7 report | ||
| Lattice c | 2.9107 Å | β-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Arrowsmith 1963 | Table 1, p. 2, row 6 report | ||
| Lattice c | 5.617 Å | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Arrowsmith 1963 | Table 1, p. 2, row 1 report | |
| Lattice c | 5.615 Å | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Kohatsu 1974 doi | Table 1, p. 2, row 4 report | |
| Lattice c | 5.618 Å ± 0.004 | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Ruddlesden 1958 doi | Table 1, p. 2, row 2 report | |
| Lattice c | 5.591 Å ± 0.004 | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Kato 1975 | Table 1, p. 2, row 5 report | |
| Lattice c | 5.622 Å | 298.15 | α-Si3N4 alloy: Si 0.428571 | experimental | [1] Ma 2003 cites Marchand 1969 doi | Table 1, p. 2, row 3 report |
Sources
Reporting papers the values were read from (a value cited from another work names that work in its row).
- Xiaoyan Ma, Changrong Li, Fuming Wang, Weijing Zhang, Thermodynamic assessment of the Si–N system, Calphad 27, 383-388 (2003). doi:10.1016/j.calphad.2003.12.005