N–Si system

34 accepted literature values from 1 paper(s) (experimental 26, model 4, unspecified 4); 0 calculated phase diagram(s). 3 further extracted value(s) not accepted by the reader-agreement checks are only in the JSON/CSV.

Data: JSON · CSV · interactive explorer · phases (8) · papers (bibliography) · Markdown

Accepted values by evidence class
Evidence classValues
experimental26
model4
unspecified4
Accepted values by property group
Property groupValues
invariant reaction7
phase transition1
formation4
heat capacity / entropy / enthalpy6
crystal structure16

Convex hulls: Materials Project DFT hull · OQMD DFT hull · CALPHAD hull SiN-03Ma-LB · CALPHAD hull SiN-92Hil

Invariant reactions (literature)

Invariant reactions reported in the literature for the N–Si system (7)
T (K)Reaction / phasesCompositions (mole fraction)ClassSourceLocationQuote
2151Liquid + gas <-> Si3N4Si3N4: N 0.571429experimental[1] Ma 2003
cites Chase 1998
Table 4, p. 5, row 5
report
2150Liquid + gas <-> Si3N4Si3N4: N 0.571429experimental[1] Ma 2003
cites Dorner 1981 doi
Table 4, p. 5, row 6
report
2150Liquid + gas <-> Si3N4L: N 0.00145; Si3N4: N 0.571429model[1] Ma 2003Table 4, p. 5, row 7
report
2129Liquid + gas <-> Si3N4Si3N4: N 0.571429experimental[1] Ma 2003
cites Kaiser 1959 doi
Table 4, p. 5, row 4
report
1687Liquid <-> diamond_Si + Si3N4L: N 2.000e-4; diamond_Si: N 0; Si3N4: N 0.571429experimental[1] Ma 2003
cites Kaiser 1959 doi
Table 4, p. 5, row 1
report
1687Liquid <-> diamond_Si + Si3N4L: N 1.200e-4; diamond_Si: N 0; Si3N4: N 0.571429experimental[1] Ma 2003
cites Yatsurugi 1973 doi
Table 4, p. 5, row 2
report
1686.94Liquid <-> diamond_Si + Si3N4L: N 0.0012; diamond_Si: N 0; Si3N4: N 0.571429model[1] Ma 2003Table 4, p. 5, row 3
report

Formation enthalpies

Literature values in kJ/mol-atom where the per-atom basis is known. DFT columns: the lowest-energy entry at the same composition (Materials Project 2026.04.13, OQMD v1.8; different energy references, never averaged), from dft_parity.json.

Enthalpies of formation, N–Si system (4)
PhaseCompoundValueT (K)ClassMP DFT (kJ/mol-atom)OQMD DFT (kJ/mol-atom)SourceLocationQuote
α-744.752 unknown ± 29.3298.15unspecified[1] Ma 2003
cites Chase 1998
Table 2, p. 2, row 5
report
α-735.68 unknown ± 25.08298.15experimental[1] Ma 2003
cites Pehlke 1959
Table 2, p. 2, row 4
report
α-Si3N4Si3N4-106.393 kJ/mol-atom ± 4.18571298.15unspecified-125.391 (mp-aaaaabma)-117.182 (oqmd-3591)[1] Ma 2003
cites Chase 1998
Table 2, p. 2, row 5
report
α-Si3N4Si3N4-105.097 kJ/mol-atom ± 3.58286298.15experimental-125.391 (mp-aaaaabma)-117.182 (oqmd-3591)[1] Ma 2003
cites Pehlke 1959
Table 2, p. 2, row 4
report

Other properties

Phase transition (1)

Phase transition, N–Si system
PropertyValueT (K)Phases / compositionClassSourceLocationQuote
Phase transition1687 K1687liquidexperimental[1] Ma 2003
cites Kaiser 1959 doi
p. 1
report
Using zone-melting experiments, Kaiser and Thurmond [10] and Yatsurugi et al. [11] measured the distribution of N between solid and liquid semiconductor-grade Si near its melting point (1687 K).

Heat capacity / entropy / enthalpy (6)

Heat capacity / entropy / enthalpy, N–Si system
PropertyValueT (K)Phases / compositionClassSourceLocationQuote
Entropy
printed: S298 K
9.17143 J/mol-atom/K298.15Si3N4
alloy: Si 0.428571
model[1] Ma 2003
cites Koshchenko 1985
Table 2, p. 2, row 3
report
Entropy
printed: S298 K
64.2 J/mol (basis unstated)/K298.15Si3N4model[1] Ma 2003
cites Koshchenko 1985
Table 2, p. 2, row 3
report
Entropy
printed: S298 K
112.967 unknown ± 16.7298.15αunspecified[1] Ma 2003
cites Chase 1998
Table 2, p. 2, row 2
report
Entropy
printed: S298 K
107.008 J/mol (basis unstated)/K298.15αexperimental[1] Ma 2003
cites Pehlke 1959
Table 2, p. 2, row 1
report
Entropy
printed: S298 K
16.1381 J/mol-atom/K ± 2.38571298.15α-Si3N4
alloy: Si 0.428571
unspecified[1] Ma 2003
cites Chase 1998
Table 2, p. 2, row 2
report
Entropy
printed: S298 K
15.2869 J/mol-atom/K298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Pehlke 1959
Table 2, p. 2, row 1
report

Crystal structure (16)

Crystal structure, N–Si system
PropertyValueT (K)Phases / compositionClassSourceLocationQuote
Lattice a7.595 Åβ-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Grun 1979 doi
Table 1, p. 2, row 8
report
Lattice a7.606 Å ± 0.003β-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Ruddlesden 1958 doi
Table 1, p. 2, row 7
report
Lattice a7.608 Åβ-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Arrowsmith 1963
Table 1, p. 2, row 6
report
Lattice a7.748 Å298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Arrowsmith 1963
Table 1, p. 2, row 1
report
Lattice a7.766 Å298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Kohatsu 1974 doi
Table 1, p. 2, row 4
report
Lattice a7.753 Å ± 0.004298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Ruddlesden 1958 doi
Table 1, p. 2, row 2
report
Lattice a7.818 Å ± 0.003298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Kato 1975
Table 1, p. 2, row 5
report
Lattice a7.765 Å298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Marchand 1969 doi
Table 1, p. 2, row 3
report
Lattice c2.9023 Åβ-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Grun 1979 doi
Table 1, p. 2, row 8
report
Lattice c2.909 Å ± 0.002β-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Ruddlesden 1958 doi
Table 1, p. 2, row 7
report
Lattice c2.9107 Åβ-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Arrowsmith 1963
Table 1, p. 2, row 6
report
Lattice c5.617 Å298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Arrowsmith 1963
Table 1, p. 2, row 1
report
Lattice c5.615 Å298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Kohatsu 1974 doi
Table 1, p. 2, row 4
report
Lattice c5.618 Å ± 0.004298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Ruddlesden 1958 doi
Table 1, p. 2, row 2
report
Lattice c5.591 Å ± 0.004298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Kato 1975
Table 1, p. 2, row 5
report
Lattice c5.622 Å298.15α-Si3N4
alloy: Si 0.428571
experimental[1] Ma 2003
cites Marchand 1969 doi
Table 1, p. 2, row 3
report

Sources

Reporting papers the values were read from (a value cited from another work names that work in its row).

  1. Xiaoyan Ma, Changrong Li, Fuming Wang, Weijing Zhang, Thermodynamic assessment of the Si–N system, Calphad 27, 383-388 (2003). doi:10.1016/j.calphad.2003.12.005